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Microlithography process technology for IC fabrication David J. Elliott

By: Material type: TextTextPublication details: New York : McGraw-Hill, 1986Edition: 1st edDescription: xix, 378 p. : ill. ; 24 cmISBN:
  • 0070193045
Subject(s): DDC classification:
  • 621.38173 ELM
Item type: Books
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Holdings
Item type Current library Collection Shelving location Call number Copy number Status Date due Barcode
Books Books KU Central Library Rack No. : 65 Shelve No. : A-01 General Stack (Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-3 (I) Available 1677
Books Books KU Central Library Rack No. : 65 Shelve No. : A-01 General Stack (Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-4 (I) Available 2471
Books Books KU Central Library Rack No. : 65 Shelve No. : A-01 General Stack (Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-5 (I) Available 2473
Books Books KU Central Library Rack No. : 65 Shelve No. : A-01 General Stack (Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-6 (I) Available 2474
Books Books KU Central Library Rack No. : 65 Shelve No. : A-01 General Stack (Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-7 (I) Available 2475
Books Books KU Central Library Rack No. : 29 Shelve No. : B-06 Reference Section (Non-Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-1 (NI) Not For Loan 2472
Books Books KU Central Library Rack No. : 29 Shelve No. : B-06 Reference Section (Non-Issuable Books) 621.38173 ELM 1986 (Browse shelf(Opens below)) C-2 (NI) Not For Loan 2951

Includes Bibliographical references.

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