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Microlithography process technology for IC fabrication

Elliott, David J.

Microlithography process technology for IC fabrication David J. Elliott - 1st ed. - New York : McGraw-Hill, 1986 - xix, 378 p. : ill. ; 24 cm.

Includes Bibliographical references.

ISBN: 0070193045

Subjects--Topical Terms:
Integrated circuits
Microlithography
Photoresists

Dewey Class. No.: 621.38173 / ELM

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