Microlithography (Record no. 9933)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00698nam a2200241 a 4500 |
| 001 - CONTROL NUMBER | |
| KUCL control number | 6243 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| KUCL control field | BD-DhUET |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20230208093659.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230208b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0070193045 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | KU |
| Modifying agency | BD-DhUET |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38173 |
| Item number | ELM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Elliott, David J. |
| 245 10 - TITLE STATEMENT | |
| Title | Microlithography |
| Remainder of title | process technology for IC fabrication |
| Statement of responsibility, etc. | David J. Elliott |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | McGraw-Hill, |
| Date of publication, distribution, etc. | 1986 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xix, 378 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes Bibliographical references. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Photoresists |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Permanent location | Current location | Shelving location | Rack Location | Full call number | Barcode | Copy number | Date acquired | Price effective from | Not for loan | Koha item type | Total Checkouts | Withdrawn status | Date last seen | Non-public note | Lost status | Source of classification or shelving scheme | Damaged status | Collection code |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| KU Central Library | KU Central Library | Reference Section (Non-Issuable Books) | Rack No. : 29 Shelve No. : B-06 | 621.38173 ELM 1986 | 2951 | C-2 (NI) | 31/12/1991 | 08/02/2023 | Not For Loan | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 29 Shelve No. : B-06 | ||||
| KU Central Library | KU Central Library | Reference Section (Non-Issuable Books) | Rack No. : 29 Shelve No. : B-06 | 621.38173 ELM 1986 | 2472 | C-1 (NI) | 31/12/1991 | 08/02/2023 | Not For Loan | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 29 Shelve No. : B-06 | ||||
| KU Central Library | KU Central Library | General Stack (Issuable Books) | Rack No. : 65 Shelve No. : A-01 | 621.38173 ELM 1986 | 2473 | C-5 (I) | 31/12/1991 | 08/02/2023 | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 65 Shelve No. : A-01 | |||||
| KU Central Library | KU Central Library | General Stack (Issuable Books) | Rack No. : 65 Shelve No. : A-01 | 621.38173 ELM 1986 | 2474 | C-6 (I) | 31/12/1991 | 08/02/2023 | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 65 Shelve No. : A-01 | |||||
| KU Central Library | KU Central Library | General Stack (Issuable Books) | Rack No. : 65 Shelve No. : A-01 | 621.38173 ELM 1986 | 2475 | C-7 (I) | 31/12/1991 | 08/02/2023 | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 65 Shelve No. : A-01 | |||||
| KU Central Library | KU Central Library | General Stack (Issuable Books) | Rack No. : 65 Shelve No. : A-01 | 621.38173 ELM 1986 | 1677 | C-3 (I) | 31/12/1991 | 08/02/2023 | Books | 08/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 65 Shelve No. : A-01 | |||||
| KU Central Library | KU Central Library | General Stack (Issuable Books) | Rack No. : 65 Shelve No. : A-01 | 621.38173 ELM 1986 | 2471 | C-4 (I) | 31/12/1991 | 08/02/2023 | Books | 09/02/2023 | Electronics & Communication Engineering Discipline | Dewey Decimal Classification | Rack No. : 65 Shelve No. : A-01 |