Elliott, David J. <br/><br/>
Microlithography   process technology for IC fabrication  
David J. Elliott 
 - 1st ed. 
 - New York :  McGraw-Hill,  1986 
 - xix, 378 p. :  ill. ;  24 cm. 
<br/><br/>Includes Bibliographical references. 
<br/><br/><label>ISBN: </label>0070193045  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits<br/>Microlithography<br/>Photoresists
<br/><br/><label>Dewey Class. No.: </label>621.38173  / ELM