Elliott, David J. <br/><br/>
Integrated  circuit fabrication technology / 
David J. Elliott. 
 - 2nd ed 
 - Toronto :  McGraw-Hill,  1989 
 - xiv, 540 p.  : ill. figs, picture. ;  24 cm 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0070193398 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fabrication process
<br/><br/><label>Dewey Class. No.: </label>621.3817  / BLI